With ±1% metering accuracy, the LFC-7000 Series Ultrasonic Flow Controller, with integral display, provides superior performance in all operating conditions, regardless of density, viscosity, gases or temperature. With a wide range of flow control from 5 to 12,000 mL/min, the LFC-7000 line of closed-loop flow control modules is designed for wet clean tools and post-CMP cleaning applications, while the integral display offers immediate dispensing feedback.
The LFC-7000 Series Ultrasonic Flow Controller combines flow meter technology with a control valve for complete control of dispensing of any slurries or chemistries. The flow meter portion features an all-PFA construction with no moving parts or seals, setting the standard for flow measurement in terms of accuracy, repeatability, and purity. Equipped with either a motor-actuated pinch valve (for slurries) or a diaphragm valve (for chemistries), the LFC-7000 provides a fast and precise response with minimal “overshoot.” The control valve features all PTFE (Polytetrafluoroethylene) construction and minimal dead volume, ensuring maximum process purity and reliability.
With additional options of port sizes of 1/4”, 3/8” or 1/2” inch and flare or pillar connections, the LFC-7000 with the integral display can be easily integrated into your current slurry or chemistry dispensing applications.
The LFC-7000 sets the standard for flow measurement in terms of accuracy, repeatability, turndown and purity. Its Digital Signal Processing (DSP) technology ensures reliable performance even with a certain degree of bubbles in the process fluids, an area where many other ultrasonic flow controllers struggle. Additionally, measurement drift is a non-issue due to ultrasonic technology that eliminates the issues that environmental conditions and temperature swings can cause with a competing differential pressure flow controller.
With the ±1% metering accuracy of the LFC-7000 Series Ultrasonic Flow Controller, your operation can ensure improved product yield by consistently manufacturing better quality wafers while minimizing costly downtime and increasing overall operational profitability.