MPT-750 High-Purity PFA Pressure Sensor

The newly designed Malema MPT Series High-Purity PFA Pressure Sensor introduces temperature as well as pressure monitoring in a single device, ensuring safe, reliable and efficient flow control in critical semiconductor applications.

The MPT Series comes in two versions: the MPT-750 with a cable connection and the MPT-751 with a Hirose connector. The MPT-750 and MPT-751 are available in single-port and flow-through designs. Both offer a standard pressure output and an optional temperature analog output.

The MPT Series empowers operators with the versatility needed to adapt to diverse conditions, ensuring reliable product yields in critical semiconductor applications.

Features

  • Dual Functionality: Economical fluid pressure and temperature sensing from a single device
  • High-Purity Materials: Wetted materials made from PFA and FFKM to help ensure compatibility with high-purity applications
  • Temperature Range: Suitable for single-phase fluids from 0°C to 70°C
  • Design Flexibility: Available in both single port and flow-through designs

Applications

  • Wet Etch
  • Wet Clean
  • Chemical and Mechanical Planarization (CMP)
  • Electrochemical Deposition (ECD)
  • Electroless Deposition
  • Wet Process / Chemical Distribution Systems
  • Chemical and Slurry Blend Systems

Specifications

Available Models, Sizes and Connections

Models Pressure Sensor Only (MPT-750-P and MPT-751-P)
Pressure and Temperature Sensor (MPT-750-T and MPT-751-T)
Sizes 1/4" 3/8" 1/2" 3/4" 1"
Single Port X X X
Flow-Through X X X X X

Fluid Connections: Tube, Pillar, and Flare

Performance Specifications

Accuracy ±1% FS
Repeatability ±0.5% FS
Ambient Temperature 0-50°C
Media Operating Temperature -5-70°C (non-phase changing)
Measurable Fluids Gases or non-phase-changing liquids
Maximum Operating Pressure Depends on pressure range; typically, 2 bar over max pressure
Ingress Protection Class IP64
Output Options Analog 4-20 mA or 0-10 V DC
Power Supply 24 V DC ±10%
Digital Communication RS-485 Malema Addressable Sensor Network (ASN)

Electrical Specifications

Output Options Analog Output Dual Passive 4-20 mA Current Loops, or Dual 0-10 V DC
Digital Output Dual Open Collectors Max 30 mA @ 60 V DC
Power Supply 24 V DC ±10%
Media Operating Temperature -5-70°C (non-phase changing)
Power Consumption Max 30 mA @ 24 V DC
Digital Communication RS-85 Malema Addressable Sensor Network (ASN)
Connector Connector (MPT-751 sensors only) 12-pin HR-30 Series Hirose Connector
Cable 1 meter, 3 meter or custom length available for MPT-750-P and MPT-750-T