M-2300 Series High-Purity Inline Ultrasonic Flow Meter

The Malema M-2300 Series High-Purity Inline Ultrasonic Flow Meter delivers precision flow measurement for demanding semiconductor applications.

The M-2300 combines the latest digital signal processing (DSP) and ultrasonic flow sensor technology into a single compact unit. Designed with minimalistic cabling for easy installation. The M-2300 series maximizes space without compromising performance.

The M-2300 Series is engineered with corrosion-resistant wetted parts by incorporating an inline PFA tube. The PFA tube incorporates ultrasonic technology with wedge mounted piezoelectric crystals to ensure accurate flow measurement. The M-2300 has no moving components or mechanical seals providing operators with reliable metering accuracy required in critical processes.

Key Features

  • Sensors and electronics in one compact unit
  • Easy installation with minimized cabling
  • No dead legs or other obstructions
  • Straight flow path with no moving parts
  • Corrosion-resistant with PFA-wetted parts
  • Free from ion/particle contamination
  • Accuracy ±1% Full Scale
  • Repeatability ±0.5% Full Scale
  • Minimal pressure loss

Applications

  • CMP
  • Cooling Systems
  • ElectroChemical Deposition (ECD)
  • Electroless Deposition (ED)
  • Laser Equipment
  • Solar PV Equipment
  • Track Tools
  • Wet Clean
  • Wet Process / Chemical Distribution Systems

Specifications

Operation Specifications

Measurable Fluid Liquids
Fluid Temperature 50°- 140°F (10°- 60°C)
Fluid Pressure 0-70 psig
Ambient Temperature 32°- 115°F (0°- 46°C)
Process Connection PFA Tube End or others*
Enclosure Classification IP64

*Consult Malema for any special requirements.

Material Specifications

Enclosure Classification IP64
Optional Cable Consult factory for available cable lengths and configurations
Non-Wetted Parts PEEK, PP, SS
Wetted Parts High-Purity PFA

Performance Specifications

Tube Size / End Connections 1/4" 3/8” 1/2”
Standard Full Scale Range 3 L/min 8 L/min 40 L/min
Accuracy ±1% Full Scale**
Repeatability ± 0.5% Full Scale**

*Custom flow ranges available upon request.
**The accuracy and repeatability specifications for custom flow ranges will always be per the Standard Full Scale Range above.

Electrical Specifications

Output Options Analog Output Current O/P:
Active: 4-20 mA (Max. Load < 900 Ω)
Passive: 4-20 mA (Max. Load < 1,200 Ω)
Voltage Output: 0-10 V DC (min. load > 10K Ω)
Pulse Output Open Collector / Max. 30 V DC, 200 mA max.
Configurable for Low Flow Rate, High Flow Rate, Totalizer Greater Than, Totalizer Less Than, Signal Strength Less, Positive Totalizer Pulse*
Digital Input Zeroing – Momentary pull-up to 24 V DC for activation
Power Supply 24 V DC ±10%
Power Consumption 125 mA
Electromagnetic Compatibility (EMC) EMC Directive 2014/30/EU
Digital Communication MODBUS over RS-485

*Pulse frequency configurable up to 1 kHz; Pulse weight configurable from 0.01 mL.

Connector or Pigtail Cable (Optional) Specification

Pin # Wire Color Function
1 White Signal OUT (4-20 mA or 0-10 V DC)
2 Brown Power IN (+24 V DC)
3 Green Remote Zero IN*
4 Yellow Alarm or Pulse OUT
5 Gray RS-285 A, Data -
6 Pink RS-485 B, Data +
7 Blue Ground (Power and Signal)
8 Red Not Used

*Momentary pull-up to 24 V DC
NOTE: Consult the factory for other cable and pin-out options

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